Title

10 Years of Advancing the Science of Semiconductor Manufacturing Excellence. ASMC 99 Proceedings

Corporate Author

Institute of Electrical and Electronics Engineers -IEEE-

Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.

Publisher

Publishing Place

Mountain View, Calif.

Publication Date

1999

ISBN

0-7803-5217-3

0-7803-5218-1

0-7803-5219-X