Title

Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films 1997. Proceedings

Person Involved

Corporate Author

Electrochemical Society -ECS-, Dielectric Science and Technology Division

Electrochemical Society -ECS-, Electronics Division

Publisher

Publishing Place

Pennington, NJ

Publication Date

1997

Series

Electrochemical Society. Proceedings; 97-10

ISBN

1-566-77137-4

Conference