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Journal of vacuum science and technology B. Microelectronics and nanometer structures
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Journal of vacuum science and technology B. Microelectronics and nanometer structures
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Journal Title
Journal of vacuum science and technology B. Microelectronics and nanometer structures
ISSN
0734-211X
1071-1023
2166-2746
2166-2754
Verlag
AIP Press
Ort
New York, N.Y.
