English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Hauptwerk
Optical inspection of microsystems
Details
Publications
Statistics
Options
Show all metadata (technical view)
Title
Optical inspection of microsystems
Person Involved
Publisher
Taylor & Francis
Publishing Place
Boca Raton
Publication Date
2007
Series
Optical science and engineering; 109
ISBN
0-8493-3682-1
