Title

Optical inspection and micromeasurements

Title Supplement

10 - 14 June 1996, Besançon, France

Person Involved

Corporate Author

Centre National de la Recherche Scientifique -CNRS-, Paris

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1996

Series

Europto series

Proceedings of SPIE; 2782

ISBN

0-8194-2168-5

Conference