Title

Design, Test, and Microfabrication of MEMS and MOEMS. Pt.1

Title Supplement

30 March - 1 April 1999, Paris, France

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1999

Series

Proceedings of SPIE; 3680,1

ISBN

0-8194-3154-0

Conference