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Smart sensors, actuators, and MEMS V
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Title
Smart sensors, actuators, and MEMS V
Titel Supplements
18-20 April 2011, Prague, Czech Republic
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
2011
Serie
Proceedings of SPIE
Konferenz
Conference "Smart Sensors, Actuators, and MEMS" 2011