Title

MOEMS and miniaturized systems III

Title Supplement

SPIE Conference on MOEMS and Miniaturized Systems, 27-29 January 2003, San Jose, USA. Proceedings

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2003

Series

Proceedings of SPIE; 4983

ISBN

0-8194-4783-8

Conference