Title

15th Workshop on Dielectrics in Microelectronics, WoDiM 2008. Papers

Title Supplement

23 - 25 June 2008, Bad Saarow (Berlin)

Person Involved

Publisher

Publishing Place

New York, N.Y.

Publication Date

2009

Series

Journal of vacuum science and technology. B, microelectronics and nanometers; 27.2009, Nr.1

ISSN

1071-1023

ISBN

978-0-9823012-1-0

Conference