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2003
Conference Proceeding
Title

MICRO.tec 2003: Applications - trends - visions. Proceedings

Title Supplement
2nd VDE World Microtechnologies Congress, October 13 - 15, 2003, International Congress Centre, Munich, Germany
Person Involved
Büttgenbach, S.
Westkämper, E.
Corporate Author
Verband der Elektrotechnik, Elektronik, Informationstechnik -VDE-
Publisher
VDE Verlag  
Publishing Place
Berlin
Conference
World Microtechnologies Congress (MICRO.tec) 2003  
Language
English
Fraunhofer-Institut für Produktionstechnik und Automatisierung IPA  
Keyword(s)
  • microassembly

  • microfabrication

  • Mikroelektronik

  • Mikrofertigung

  • Mikrosystemtechnik

  • Nanotechnik

  • Fertigung

  • Microfluidics

  • microsystem

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