Title

IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM) 2023. Proceedings

Title Supplement

Dresden, Germany, 22 May - 25 May 2023

Corporate Author

Institute of Electrical and Electronics Engineers -IEEE-

IEEE Electron Devices Society

Japan Society of Applied Physics -JSAP-

Publisher

Publication Date

2023

ISBN

979-8-3503-1098-6

979-8-3503-1097-9

DOI

10.1109/IITC/MAM57687.2023

Conference

International Interconnect Technology Conference 2023

Materials for Advanced Metallization Conference 2023

Acronym

IITC

MAM

Language

English