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Title
Smart sensors, actuators and MEMS III
Title Supplement
2 - 4 May 2007, Maspalomas, Gran Canaria, Spain
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Europe, Cardiff
Publisher
Publishing Place
Bellingham, WA
Publication Date
2007
Series
Proceedings of SPIE; 6589
ISBN
978-0-8194-6717-1