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Title
Micro System Technologies '96
Title Supplement
5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, September 17 - 19, 1996
Person Involved
Corporate Author
MESAGO Messe Frankfurt GmbH, Stuttgart
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin
Publisher
Publishing Place
Berlin
Publication Date
1996
ISBN
3-8007-2200-3