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Reliability, testing, and characterization of MEMS/MOEMS III
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Title
Reliability, testing, and characterization of MEMS/MOEMS III
Titel Supplements
26 - 28 January 2004, San Jose, California, USA. SPIE Conference on Reliability, Testing, and Characterization of MEMS/MOEMS
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
2004
Serie
Proceedings of SPIE
Konferenz
Conference on Reliability, Testing, and Characterization of MEMS/MOEMS 2004
Schlagwort
MEMS
;
MOEMS
;
testing