Title

Emerging lithographic technologies VIII. Vol.2

Title Supplement

24 - 26 February 2004, Santa Clara, California, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2004

Series

Proceedings of SPIE; 5374

ISBN

0-8194-5287-4

978-0-8194-5287-0

Conference