Title

Chemical vapor deposition. Proceedings of the fourteenth international conference and EUROCVD-11

Person Involved

Corporate Author

Electrochemical Society -ECS-, High Temperature Materials Division

Electrochemical Society -ECS-, Dielectric Science and Technology Division

Publisher

Publishing Place

Pennington, NJ

Publication Date

1997

Series

Electrochemical Society. Proceedings; 97-25

ISBN

1-566-77178-1

Conference