Title

MOEMS and miniaturized systems IX
Titel Supplements
25 - 27 January 2010, San Francisco, California, United States; at SPIE Photonics West
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
Verlagsort
Bellingham, WA
Datum
2010
Serie
Proceedings of SPIE
ISBN
978-0-8194-7990-7
Konferenz