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The Thirteenth Annual International Conference on Micro Electro Mechanical Systems 2000. Proceedings
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Title
The Thirteenth Annual International Conference on Micro Electro Mechanical Systems 2000. Proceedings
Verlag
IEEE
Verlagsort
Piscataway, NJ
Datum
2000
Konferenz
International Conference on Micro Electro Mechanical Systems (MEMS) 2000