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Title

The Thirteenth Annual International Conference on Micro Electro Mechanical Systems 2000. Proceedings

Verlag
IEEE
Verlagsort
Piscataway, NJ
Datum
2000
ISBN
0-7803-5273-4
0-7803-5274-2
0-7803-5275-0
0-7803-5989-5
Konferenz
International Conference on Micro Electro Mechanical Systems (MEMS) 2000
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