Title

Advances in Patterning Materials and Processes XXXI

Title Supplement

San Jose, California, USA; February 2014

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2014

Series

Proceedings of SPIE; 9051

ISBN

978-0-8194-9974-5

Conference