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IEEE 22nd International Conference on Micro Electro Mechanical Systems, MEMS 2009
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Title
IEEE 22nd International Conference on Micro Electro Mechanical Systems, MEMS 2009
Titel Supplements
Proceedings of a meeting held 25-29 January 2009, Sorrento, Italy
Institut
Institute of Electrical and Electronics Engineers -IEEE-
Verlag
IEEE
Verlagsort
Piscataway, NJ
Datum
2009
Konferenz
International Conference on Micro Electro Mechanical Systems (MEMS) 2009