Title

26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015. Proceedings

Title Supplement

3-6 May 2015, Saratoga Springs, NY

Corporate Author

Institute of Electrical and Electronics Engineers -IEEE-

Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.

IEEE Electron Devices Society

IEEE Components, Packaging, and Manufacturing Technology Society

Publisher

Publishing Place

Piscataway, NJ

Publication Date

2015

ISBN

978-1-4799-9930-9

978-1-4799-9931-6

Conference