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MEMS/MOEMS: Advanced in photonic communications, sensing, metrology, packaging and assembly
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Title
MEMS/MOEMS: Advanced in photonic communications, sensing, metrology, packaging and assembly
Titel Supplements
28 - 29 October 2002, Brugge, Belgium
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
2003
Serie
Proceedings of SPIE
Konferenz
Conference MEMS/MOEMS 2002