Title

Mask technology for integrated circuits and micro-components. Lectures held at the GMM-conference

Person Involved

Corporate Author

VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-

Publisher

Publishing Place

Berlin

Publication Date

1997

Series

GMM-Fachbericht; 21

ISBN

3-8007-2310-7

Conference