Title

24th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2013

Title Supplement

14-16 May 2013, Saratoga Springs, NY

Corporate Author

Institute of Electrical and Electronics Engineers -IEEE-

Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.

Publisher

Publishing Place

New York, NY

Publication Date

2013

ISBN

978-1-4673-5006-8

978-1-4673-5007-5

Conference