Title

MEMS '98. the Eleventh Annual International Workshop on Micro Electro Mechanical Systems. Proceedings

Corporate Author

American Society of Mechanical Engineers -ASME-, Dynamic Systems and Control Division

IEEE Robotics and Automation Society

Publisher

Publishing Place

Piscataway, NJ

Publication Date

1998

ISBN

0-7803-4412-X

0-7803-4413-8

0-7803-4414-6

Conference