Title

Modeling aspects in optical metrology II

Title Supplement

15 - 16 June 2009, Munich, Germany

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Europe, Cardiff

Publisher

Publishing Place

Bellingham, WA

Publication Date

2009

Series

Proceedings of SPIE; 7390

ISBN

978-0-8194-7673-9

Conference