English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Hauptwerk
Front-end junction and contact formation in future silicon/germanium based devices
Information
Publications
Export
Statistics
Options
Title
Front-end junction and contact formation in future silicon/germanium based devices
Titel Supplements
Proceedings of the E-MRS 2008 Symposium, held from May 26th to May 29th 2008 in Strasbourg, France
Institut
European Materials Research Society -EMRS-
Verlag
Elsevier
Verlagsort
Amsterdam
Datum
2008
Serie
Materials Science and Engineering. B
Konferenz
Symposium "Front-End Junction and Contact Formation in Future Silicon/Germanium based Devices" 2008