Title

Front-end junction and contact formation in future silicon/germanium based devices

Title Supplement

Proceedings of the E-MRS 2008 Symposium, held from May 26th to May 29th 2008 in Strasbourg, France

Person Involved

Corporate Author

European Materials Research Society -EMRS-

Publisher

Publishing Place

Amsterdam

Publication Date

2008

Series

Materials Science and Engineering. B; 154/155.2008

Conference