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  4. From near infra-red to the deep Ultra Violet: Low loss coatings with oxides using an Ion Beam Sputtering System
 
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2025
Conference Paper
Title

From near infra-red to the deep Ultra Violet: Low loss coatings with oxides using an Ion Beam Sputtering System

Abstract
The optical performance of dielectric mirror coatings at 1064nm, 532nm, 355nm and 193nm deposited using a dual Ion Beam sputtering system are being presented and discussed.
Author(s)
Ribeaud, Alexandre
Bühler Leybold Optics
Pistner, Jürgen
Bühler Leybold Optics
Vela-Peréz, Isabel
Bühler Leybold Optics
Mühlig, Christian
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Gischkat, Thomas
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Hagedorn, Harro
Bühler Leybold Optics
Schröder, Sven  
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Mainwork
Optical Interference Coatings Conference 2025  
Conference
Optical Interference Coatings Conference 2025  
DOI
10.1364/OIC.2025.MC.7
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
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