Design Methodology for Liquid Micropumps

Many biomedical, analytical or experimental applications require the precise dosing of small amounts of liquid while space and energy supply for the dosing unit are often limited. To address these requirements, different types of micropumps have been developed and characterized in research. This chapter gives an overview of mechanical micropumps and their different actuation types. Moving from makrofluidic to microfluidic fluid transport comes along with challenges, that have to be overcome by the fluidic actuator to allow for safe use for example in the biomedical field. The presented book chapter describes the design methodology and electromechanical as well as fluidical aspects to be considered when developing a micropump on the example of a piezoelectrically driven micro diaphragm pump with passive flap valves.