Vectorial Micro Scanning Mirror for Fast Beam Positioning of a Compact Medical Therapy Laser

Miniaturized vectorial beam steering mirrors are required in numerous applications like (i) LIDAR, (ii) diagnostic imaging or (iii) miniaturized therapeutic laser systems. In this article we present a new type of electrostatically driven vectorial (2D quasi-static) MEMS scanning mirror with monolithic integrated position sensors. The vectorial MEMS scanner was specially optimized for the requirements of a compact therapeutic photocoagulation laser system for the treatment of retinal eye diseases. This requires a highly miniaturized MEMS scanning system for fast and precise vectorial beam positioning of the treatment laser with a positioning time of ≤ 5 ms. The quasi-static 2D drive of the presented 2D MEMS scanning mirror is based on electrostatic vertical comb actuators in combination with a non-cardanic suspension of the 2.2 mm circular mirror plate. To measure and control the actual beam position piezoresistive position sensors are monolithically integrated into the MEMS design. The MEMS scanner was designed for a quasi-static (mechanical) 2D tilt angle of ± 2 ° for both scan axes each in two frequency variants with 714 Hz and 1 kHz at 70 V and 130 V drive voltage, respectively. For high laser powers of > 1.5 W (average power) at 519 nm wavelength, highly reflective optical coatings based on a symmetric HRC design of enhanced (hybrid) Al with R ≥ 98 % are used.