Phase-locked and phase-tuned resonant-MOEMS external cavity QCLs and their application for fast and broadband mid-infrared reflectometry

The combination of broadband quantum cascade lasers (QCLs) with micro-electro-mechanical system (MOEMS) scanners having an integrated diffraction grating as emission-wavelength-selective element enables the realization of very compact, rapidly tuneable, and robust light sources for mid-infrared spectroscopy. In contrast to a motor-driven mechanical grating tuning mechanism, MOEMS scanners do not limit the lifetime of the laser module, as they are made from single-crystalline silicon and undergo no mechanical wear¹