Hybrid Packaging Solution for Electrochemical Sensors Hybride Packaging-Lösung für Elektrochemische Sensoren

We present a simple and reliable hybrid packaging of rigid electrochemical transducers and flexible foil having electrical connections. Among a large number of biochemical transducers, we target in this work two types of transducers: 3-electrode systems and ion selective field effect transistors (ISFET). The hybrid packaging ensures several requirements such as: biocompatibility to biological analytes, precise tight encapsulation, protection of transducers surface, mechanical stability, reliable electrical contact and light shielding of sensitive parts. The proposed hybrid packaging of biochemical transducers is based on a flip-chip bonding process, which necessitates low-cost materials, a reduced number of processing steps as well as compatibility to common roll-to-roll (R2R) processes.