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  4. Laying the foundations of ultrafast stealth dicing of silicon with picosecond laser pulses at 2-µm wavelength
 
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2021
Conference Paper
Title

Laying the foundations of ultrafast stealth dicing of silicon with picosecond laser pulses at 2-µm wavelength

Author(s)
Blothe, Markus
Friedrich-Schiller-Universität Jena
Chambonneau, Maxime
Friedrich-Schiller-Universität Jena
Heuermann, Tobias
Friedrich-Schiller-Universität Jena
Gebhardt, Martin
Friedrich-Schiller-Universität Jena
Limpert, Jens  
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Nolte, Stefan H.  
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Mainwork
Optics Infobase Conference Papers
Conference
2021 European Conference on Lasers and Electro-Optics, CLEO/Europe 2021
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
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