2020
Conference Paper
Title

PECVD silicon nitride photonic integrated circuits and key building blocks for sensing applications

Abstract
We report the development of CMOS compatible PECVD silicon nitride waveguide based photonic integrated circuits and their application for optical coherence tomography (OCT) and colorimetric gas sensing.
Author(s)
Hainberger, Rainer
Austrian Institute of Technology
Müellner, Paul
Austrian Institute of Technology
Nevlacsil, Stefan
Austrian Institute of Technology
Eggeling, Moritz
Austrian Institute of Technology
Maese-Novo, Alejandro
Austrian Institute of Technology
Vogelbacher, Florian
Austrian Institute of Technology
Sagmeister, Martin
ams AG
Kraft, Jochen
ams AG
Seyringer, Dana
FHV - Vorarlberg University of Applied Sciences
Trupp, Sabine  
Fraunhofer Research Institution for Microsystems and Solid State Technologies EMFT  
Henfling, Michael  
Fraunhofer Research Institution for Microsystems and Solid State Technologies EMFT  
Plesshoff, Svenja
Scienion AG
Vaupot, Jan
Royal Philips
Sladecek, Marcel
Royal Philips
Rank, Elisabet A.
Medizinische Universität Wien, Zentrum für Medizinische Physik und Biomedizinische Technik
Drexler, Wolfgang
Medizinische Universität Wien, Zentrum für Medizinische Physik und Biomedizinische Technik
Mainwork
Optics Infobase Conference Papers
Funder
Horizon 2020 Framework Programme
Conference
Optical Sensors, Sensors 2020 - Part of Optical Sensors and Sensing Congress 2020
Language
English