Fraunhofer Institute for Integrated Systems and Device Technology IISB. Achievements and Results. Annual Report 2021

Unique for a research institution: Fraunhofer IISB operates a 200 mm capable AIXTRON Epitaxial Planetary Reactor. The system, which is located in one of Fraunhofer IISB's clean rooms, is used to deposit epitaxial layers on 150 mm and 200 mm substrates, especially silicon carbide.