An electrostatic micro-pump and a process to produce an electrostatic micro-pump

An embodiment according to the invention is an electrostatic micro-pump comprising a diaphragm arrangement comprising a diaphragm and a first electrode structure. The electrostatic micro-pump further comprises a valve arrangement, comprising an inlet check valve and an outlet check valve, wherein the diaphragm arrangement and the valve arrangement at least partially enclose a pump chamber. The electrostatic micro-pump further comprises a second electrode structure arranged so as to form an electrostatic drive with the first electrode structure. The electrostatic drive is configured to deflect the diaphragm. The electrostatic micro-pump further comprises at least one anti-stiction bump arranged between the first electrode structure and the second electrode structure, wherein in an inactive state of the micro-pump, a spacing between the first electrode structure and the second electrode structure varies towards a center region of the pump chamber when starting from a peripheral region of the pump chamber, wherein the peripheral region encloses the center region.