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  4. Characterization of femtosecond laser-written waveguides in silicon
 
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2023
Conference Paper
Title

Characterization of femtosecond laser-written waveguides in silicon

Abstract
We characterize laser-written waveguides in silicon versus the inscription parameters such as scanning speed and pulse energy. The analysis is carried out at different wavelengths and polarization states. Finally, the silicon sample is annealed to investigate the possible mechanism that leads to positive refractive index changes.
Author(s)
Alasgarzade, Namig
Alberucci, Alessandro
Blothe, Markus
Chambonneau, Maxime
Jisha, Chandroth P.
Nolte, Stefan  
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Mainwork
CLEO: Science and Innovations 2023  
Conference
Meeting "CLEO - Science and Innovations" 2023  
Conference on Lasers & Electro-Optics 2023  
DOI
10.1364/CLEO_SI.2023.STh4N.2
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
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