• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Scopus
  4. Annular Gray Tone Lithography for the Fabrication of Rotationally Symmetric Continuous Relief Meso- and Microscale Optical Elements
 
  • Details
  • Full
Options
2023
Journal Article
Title

Annular Gray Tone Lithography for the Fabrication of Rotationally Symmetric Continuous Relief Meso- and Microscale Optical Elements

Abstract
Annular lithography is a recently introduced, flexible technique that has been tailored to the fabrication of rotationally symmetric optical structures in the meso and micro range. The optical concept for the exposure tool is based on a combination of axicons with movable components that create a ring-shaped light distribution with variable diameter in the image plane. This contribution demonstrates for the first time the use of gray tone exposure in annular lithography to fabricate continuous relief structures, overcoming the previous limitation using binary structures. For the controlled exposure of the continuous relief structures, the sensitivity curve of the resist, the exposure dose decreasing with increasing ring diameter, and the exposure time have to be considered. A control and simulation tool is introduced to provide radius-dependent exposure data and, furthermore, to control and iteratively improve the fabricated structures. To demonstrate the gray tone capabilities, various diffractive elements as well as refractive spherical and aspherical elements with a maximum diameter of ~6 mm and a maximum height of 4 µm are shown as examples. Profile shape measurements of fabricated elements show good agreement with the expectations.
Author(s)
Knoblich, Maria
Uwurukundo, Xavier
Stumpf, Daniela
Kraus, Matthias
Hillmer, Hartmut
Brunner, Robert  
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Journal
Photonics  
Open Access
DOI
10.3390/photonics10091000
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Keyword(s)
  • annular gray tone lithography

  • axicon

  • diffractive and refractive structures

  • ring-shaped light distribution

  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024