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  4. Secure and Reliable Power Monitoring for Low Consumption Factory Equipment via Programmable IoT Devices
 
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2022
Conference Paper
Title

Secure and Reliable Power Monitoring for Low Consumption Factory Equipment via Programmable IoT Devices

Abstract
This paper reports on the implementation of low cost Internet-of-Things enabled power sockets, deployed on the Fraunhofer institute for Microsystems and Solid State Technologies clean room on one of the inspection microscopes used on the CMOS compatible line. The devices were flashed with open source software to ensure local, secure and reliable control without the necesity of an external cloud provider. The architecture of the physical deployment is shown and experimental data is analysed in order to obtain insight into the usage and statistics behind a previously unknown station in the clean room.
Author(s)
Garnica Barragan, Sergio Alfredo
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Wieland, Robert  
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Mainwork
International Symposium on Semiconductor Manufacturing, ISSM 2022. Proceedings of Technical Papers  
Conference
International Symposium on Semiconductor Manufacturing 2022  
DOI
10.1109/ISSM55802.2022.10026914
Language
English
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Keyword(s)
  • Big Data

  • Factory IoT

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