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2023
Conference Paper
Title
Extended Unambiguous Measurement Range in Multi-Wavelength Digital Holography Using Virtual CAD Rendered Height Maps
Abstract
We present a novel method to extend the unambiguous height measurement range in multi-wavelength holography using matching with a CAD model. For test measurements the range was increased from 20 µm to 100 mm with the automatic determination of object surfaces.
Author(s)
Language
English