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  4. Differential Thermal Conductivity Hydrogen Sensor
 
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2023
Conference Paper
Title

Differential Thermal Conductivity Hydrogen Sensor

Abstract
In this work, a thermal conductivity sensor for the detection of hydrogen in fuel cell applications is presented. The sensor uses a differential measuring concept with two cavities combined on one semiconductor-die where one of those cavities is hermetically sealed and filled with nitrogen as a reference gas. The sensors were characterized with hydrogen concentrations between 0 and 3.5 % at different heater temperatures. A 3σ-noise level of 0.06 % hydrogen was achieved with the prototype sensor.
Author(s)
Emperhoff, Sophie
Univ. Freiburg/Brsg., Institut für Mikrosystemtechnik -IMTEK-  
Eberl, Matthias
Infineon Technolgies AG
Barraza, Julia Perez
Infineon Technologies AG
Brandl, Florian
Infineon Technologies AG
Wöllenstein, Jürgen  
Univ. Freiburg/Brsg., Institut für Mikrosystemtechnik -IMTEK-  
Mainwork
SMSI 2023, Sensor and Measurement Science International  
Conference
Conference "Sensor and Measurement Science International" 2023  
DOI
10.5162/SMSI2023/A5.3
Language
English
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Keyword(s)
  • Thermal conductivity

  • MEMS

  • Hydrogen

  • Gas sensor

  • Automotive

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