Layer Stack Dependencies of Self-Generated Nonlinear Signals in Layered SAW Resonators

In this work a systematic investigation was carried out, which targeted the dependencies of nonlinear generated signals on the layer stack of a device. Previous work on material contributions to nonlinearity focused almost exclusively on TC-SAW devices. To clarify how nonlinearity depends on the stack of layered systems, test devices with a nearly constant admittance curve for respectively different layer stacks were designed. Using the Design of Experiment methodology, a response surface depending on three layer thicknesses was derived.