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2023
Journal Article
Title
Resource-efficient generation of large-area micro and nanostructures
Title Supplement
High-quality, large area diffraction gratings originated by diode laser-driven interference lithography
Abstract
Lasers are widely used in various manufacturing processes. In order to achieve sustainable production, it is important to reduce the environmental impact caused by the laser operation. One major improvement is the step from gas lasers to diode lasers.
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