Compact silicon-based attenuated total reflection (ATR) sensor module for liquid analysis

Infrared attenuated total reflection (ATR) spectroscopy is a common laboratory technique for the analysis of highly absorbing liquids and solids, and a variety of ATR accessories for laboratory FTIR spectrometers are available. However, ATR spectroscopy is rarely found in industrial processes, where compact, robust, and cost-effective sensors for continuous operation are required. Here, narrowband photometers are more appropriate than FTIR instruments. We show the concept and implementation of a compact Si-based ATR module with a four-channel microelectromechanical systems (MEMS) detector. Measurements of liquid mixtures demonstrate the suitability for applications in the chemical industry. Apart from sapphire (for wavelengths below 5 µm) and diamond (extending to the far-infrared region), most materials for ATR elements do not have either high enough infrared transmission or sufficient mechanical and chemical stability to be exposed to process fluids, abrasive components, or aggressive cleaning agents. However, using diamond coatings on Si improves the stability of the sensor surface. In addition, by proper choice of incidence angle and coating thickness, an enhancement of the ATR absorbance is theoretically expected and demonstrated by first experiments using a compact sensor module with a diamond-coated Si ATR element.