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  4. Size dependent sensor response for cobalt oxide-based MEMS pellistors
 
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2022
Poster
Title

Size dependent sensor response for cobalt oxide-based MEMS pellistors

Title Supplement
Poster presented at MNE Eurosensors 2022, 19th - 23rd September 2022, Leuven, Belgium
Author(s)
Yurchenko, Olena  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Bierer, Benedikt  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Isserstedt-Trinke, Annett
Micro-Hybrid Electronic GmbH
Jägle, Martin  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Biermann, Steffen
CMOS-IR GmbH
Wöllenstein, Jürgen  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Conference
Conference on Micro and Nano Engineering 2022  
Open Access
File(s)
Download (1.06 MB)
Rights
CC BY 4.0: Creative Commons Attribution
DOI
10.24406/publica-861
Language
English
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Keyword(s)
  • MEMS pellistors

  • Sensors

  • MEMS hotplates

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