AR coatings for oblique light incidence by combining homogeneous and nanostructured layers

Low-index nanostructured silica layers can be produced by overcoating an initial organic structure with silica and subsequent removal of the organic constituents. The silica layers can be tailored to achieve defined effective refractive indices and thicknesses. Polarization-neutral antireflective coatings for light incidence angles up to 70° were designed by combining two nanostructured layers with a few homogeneous oxide and fluoride layers.