Determination of the characteristics of a self-built coherence scanning interferometer with a universal calibration artefact

ISO 25178-601 ff. define specific characteristics of individual measuring principles including coherence scanning interferometry (CSI) in -604. In the present study, we use a previously developed Universal Calibration Artefact to examine which additional information about CSI-specific metrological characteristics can be obtained by the evaluation of its measured data. In doing so, a self-built CSI as an exemplary measuring instrument is examined in a case study to test which of the material measures type ASG, AFL, ARS, ACG, AIR according to ISO 25178-70 and the chirp material measure (CIN) can be used to acquire detailed information about the characteristics that are specific to the optical setup of a CSI and their possible deviations. It can be shown that additional information about many characteristics including the properties of the light source like the wavelength or bandwidth, or information about the optical setup like the numerical aperture, can be extracted from a series of only seven measurements of the Universal Calibration Artefact.