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  4. Ultrashort Pulse Written Waveguides in Silicon
 
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2022
Conference Paper
Title

Ultrashort Pulse Written Waveguides in Silicon

Abstract
We report on the inscription of waveguides in the bulk of crystalline silicon using infrared ultrashort laser pulses. The waveguides are characterized with respect to their structure, refractive index profile and guiding properties in detail.
Author(s)
Nolte, Stefan  
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Alasgarzade, Namig
Alberucci, Alessandro
Blothe, Markus
Jisha, Chandroth P.
Matthäus, Gabor
Chambonneau, Maxime
Mainwork
Bragg Gratings, Photosensitivity and Poling in Glass Waveguides and Materials 2022  
Conference
Meeting "Bragg Gratings, Photosensitivity and Poling in Glass Waveguides and Materials" 2022  
Advanced Photonics Congress 2022  
DOI
10.1364/BGPPM.2022.BW2A.1
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Keyword(s)
  • Silicon

  • Ultrashort pulses

  • Waveguides

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