2022
Conference Paper
Titel

Ultrashort Pulse Written Waveguides in Silicon
Abstract
We report on the inscription of waveguides in the bulk of crystalline silicon using infrared ultrashort laser pulses. The waveguides are characterized with respect to their structure, refractive index profile and guiding properties in detail.
Author(s)
Nolte, Stefan
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
Alasgarzade, Namig
Alberucci, Alessandro
Blothe, Markus
Jisha, Chandroth P.
Matthäus, Gabor
Chambonneau, Maxime
Hauptwerk
Konferenz
Thumbnail Image
DOI
Language
English
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