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  4. Prediction of the evolution of defects induced by the heated implantation process: Contribution of kinetic Monte Carlo in a multi-scale modeling framework
 
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2023
Journal Article
Title

Prediction of the evolution of defects induced by the heated implantation process: Contribution of kinetic Monte Carlo in a multi-scale modeling framework

Abstract
Extended defects formed as a result of heated implantation and thermal annealing are studied using transmission electron microscopy and kinetic Monte Carlo simulations. We highlight the relevance of using kinetic Monte Carlo approach to provide information to continuum-scale simulations as well as the value of integrating data from atomic-scale calculations for its calibration.
Author(s)
Julliard, Pierre-Louis
STMicroelectronics
Johnsson, Anna  
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Zographos, Nik
Synopsys Switzerland LLC
Demoulin, Richard
LAAS-CNRS  
Monflier, Richard
LAAS-CNRS  
Jay, Antoine
LAAS-CNRS  
Er-Riyahi, Oussama
LAAS-CNRS  
Monsieur, Frédéric
STMicroelectronics
Joblot, Sylvain
STMicroelectronics
Deprat, Frédéric
STMicroelectronics
Rideau, Denis
STMicroelectronics
Pichler, Peter  orcid-logo
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Hémeryck, Anne
STMicroelectronics
Cristiano, Fuccio
LAAS-CNRS  
Journal
Solid-State Electronics  
Conference
International Conference on Simulation of Semiconductor Processes and Devices 2022  
Open Access
DOI
10.1016/j.sse.2022.108521
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Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Keyword(s)
  • Kinetic Monte Carlo

  • Process simulation

  • Heated implantation

  • Multi-scale modeling

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