Robust silicon micropump of chip size 5x5x0.6 mm3 with 4 ml/min air and 0.5 ml/min water flow rate for medical and consumer applications

A small, robust and high flow silicon micropump with chip size of 5x5x0.6 mm3 is demonstrated with seven times higher air and water flow rate as current state of the art micropumps of that size. High self-pumping frequencies of minimum 290 min-1 and 30 min-1 for air and water have been achieved by reducing fluidic resistances and enhancing piezo mounting processes. Thus, leading to sufficient air suction and back-pressures of maximum 15 kPa and minimum-14 kPa enabling self-priming and bubble-tolerant pumping with water. Further, first-time measurements of an operation window for different actuation waveforms are presented, showing higher flow rate in rectangular actuation for air and water than sinusoidal. Additionally, long-term reliability analysis during and after temperature cycling with air indicated no significant change to actuator stroke.